| http://www.w3.org/ns/prov#value | - a) planarizing the substrate; b) depositing a passivation layer on the substrate, the passivation layer including an electrically insulating and optically transmissive material characterized by a first index of refraction; c) depositing a waveguide layer on the passivation layer, the waveguide layer including an optically transmissive material characterized by a second index of refraction and a wa
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