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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	27, 2006Jan 15, 2013Semiconductor Energy Laboratory Co., Ltd.Antenna and manufacturing method thereof, semiconductor device including antenna and manufacturing method thereof, and radio communication systemUS8361845Oct 20, 2010Jan 29, 2013Semiconductor Energy Laboratory Co., Ltd.Method for manufacturing semiconductor deviceUS8399881May 9, 2011Mar 19, 2013Semiconductor Energy Laboratory Co., Ltd.M
http://www.w3.org/ns/prov#wasQuotedFrom	google.com