| http://www.w3.org/ns/prov#value | - Patent US5970374 - Method for forming contacts and vias with improved barrier metal step-coverage - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA method is described for overcoming the non-conformity and poor step coverage incurred when materials such as metals and barrier materials are deposited into contact or via openings by physical
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