| http://www.w3.org/ns/prov#value | - ally depositing a material layer including such material layers as a low viscosity oxide, glass, metal or polymer material on the first substrate; (d) compliantly bonding the pseudomorphic epitaxial layer to a second substrate; (e) treating the first substrate having implanted ion to cause the first substrate to split at the selected depth; forming a freestanding portion of the first substrate, se
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