About: http://webisa.webdatacommons.org/378988157

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Vacuum gauges, which are generally used are, for example, an ionization-type or a thermocouple-type, which are not suitable for measuring the pressure in the control chamber 17 when the etching gas is a corrosive gas such as chlorine.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com