| http://www.w3.org/ns/prov#value | - Patent US7256139 - Methods and apparatus for e-beam treatment used to fabricate integrated ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsOne embodiment of the present invention is a method for fabricating a low-k dielectric film that included steps of: (a) chemical vapor depositing a lower-k dielectric film; and (b) e-beam treating
|
