| http://www.w3.org/ns/prov#value | - Patent US6670038 - Method of depositing particles with an electrostatic chuck - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsThe present invention is directed to electrostatic chucks, methods for their use, the electrostatic deposition of objects, such as particles in a dry powder, onto recipient substrates, and the recipient substrates
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