| http://www.w3.org/ns/prov#value | - another aspect of the present invention is a film deposition method, comprising the steps of: (A) preparing a first electrode including a plurality of sub-electrodes, a second electrode, and a material electrically connected to the second electrode and evaporated by arc discharge; (B) evaporating the material by causing the arc discharge simultaneously among the material and the plurality of sub-e
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