| http://www.w3.org/ns/prov#value | - Last, conductive shield films 415 as first shield portions and conductive shield films 403 as second shield portions are formed by a method of evaporating, etc., for example, metal such as aluminum or chromium or a metal compound, etc., as shown in FIG. 34D. After this, conductive shield films in areas other than the needles are patterned to form electrodes, whereby each shield film 403 is formed
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