About: http://webisa.webdatacommons.org/379358788

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	, and methods for planarizing micro-device workpiecesUS696252024 Ago 20048 Nov 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS696930619 Ago 200429 Nov 2005Micron Technology, Inc.Apparatus for planarizing microelectronic workpiecesUS6971945 *23 Feb 20046 Dic 2005Rohm And Haas Electronic Materials Cm
http://www.w3.org/ns/prov#wasQuotedFrom	google.es