| http://www.w3.org/ns/prov#value | - B.V.Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatusUS76565289 Feb 20072 Feb 2010Kla-Tencor CorporationPeriodic patterns and technique to control misalignment between two layersUS766375321 Dic 200716 Feb 2010Kla-Tencor Technologies CorporationAp
|
