http://www.w3.org/ns/prov#value | - Patent US7371429 - Precursor, thin layer prepared including the precursor, method of preparing ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA Te precursor containing Te, a 15-group compound (for example, N) and/or a 14-group compound (for example, Si), a method of preparing the Te precursor, a Te-containing chalcogenide thin layer
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