| http://www.w3.org/ns/prov#value | - Patent US5618388 - Geometries and configurations for magnetron sputtering apparatus - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of su
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