| http://www.w3.org/ns/prov#value | - ace passivation film of an insulating film such as SiON on said first surface passivation film and the surface of said first-stage recess groove; removing said first and second surface passivation films on an area where an ohmic electrode is to be formed and forming said ohmic electrode on the area by vapor deposition; and forming a second-stage recess groove on said firs recess groove by photolit
|
