| http://www.w3.org/ns/prov#value | - Patent US7825031 - Method of fabricating a semiconductor device - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsThe invention relates to a method of fabricating an integrated circuit, including the steps of providing at least one layer; performing a first implantation step, wherein particles are implanted into the layer under a first dire
|
