| http://www.w3.org/ns/prov#value | - Namely, it has been confirmed by the present inventors that a water-soluble polymer such as polyvinyl alcohol is useful as a mask material which is excellent in rubbing resistance, and does not give a bad influence to the alignment film made of for example polyimide, with the use of a water-soluble polymer, it is possible to perform the patterning and stripping of the resist without requiring a so
|