| http://www.w3.org/ns/prov#value | - Japanese Laid-Open Patent Application, Laid-Open No. 167406/1990, filed in the name of the assignee of the subject application, proposes a position detecting system by which the effect of unwanted light is removed and signal processing of high signal-to-noise ratio is assured, such that the relative position of a first object such as a mask and a second object such as a wafer can be detected very
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