| http://www.w3.org/ns/prov#value | - ambers 112 to 115 has a susceptor on which the object to be processed is to be placed, and the object to be processed undergoes various kinds of processes therein such as film forming, annealing, and removal of a natural oxide film. [0138] A transfer arm 126 configured to be extendable/contractible and rotatable is provided in the transfer chamber 111, and the transfer arm 126 delivers the object
|
