| http://www.w3.org/ns/prov#value | - S. 6A and 6B are flowcharts showing an endpoint detecting operation shown in FIGS. 4 and 5; [0029]FIG. 7 is a constitutional view of a third embodiment of a method and an apparatus for detecting an endpoint of polishing processing according to the present invention; [0030]FIG. 8 is a constitutional view of a fourth embodiment of a method and an apparatus for detecting an endpoint of polishing proc
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