| http://www.w3.org/ns/prov#value | - Patent US5179499 - Multi-dimensional precision micro-actuator - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsMechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale....http://www.google.com/patents/US5179499
|
