| http://www.w3.org/ns/prov#value | - Patent US6413383 - Flowing a gas into a magnetron, generating a plasma, then depressuring and ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA DC magnetron sputter reactor for sputtering copper, its method of use, particularly the ignition sequence, and shields and other parts promoting self-ionized plasma (SIP) sputtering, preferabl
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