| http://www.w3.org/ns/prov#value | - asma reactorUS20070087455Feb 22, 2006Apr 19, 2007Applied Materials, Inc.Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactorUS20070119546Nov 15, 2006May 31, 2007Applied Materials, Inc.Plasma immersion ion implantation apparatus including a capacitively coupled plasma source having low dissociation and low minimum plasma voltageUS20070212811Apr 19, 20
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