About: http://webisa.webdatacommons.org/380897527

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	021 Mar 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS68693358 Jul 200222 Mar 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS689333230 Aug 200417 May 2005Micron Technology, Inc.Carrier assemb
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au