| http://www.w3.org/ns/prov#value | - Patent US6127908 - Microelectro-mechanical system actuator device and reconfigurable circuits ... - Google PatentsSearch Images Maps Play YouTube News Gmail Drive More ??Sign inAdvanced Patent SearchPatentsA microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with
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