| http://www.w3.org/ns/prov#value | - ???1020 atoms/cm3 of such halogen element as chlorine and fluorine is contained in either one or two of the semiconductor film (channel region provided in the semiconductor film) and the gate insulating film which constitute TFT. The halogen element has a function that it will combine with such mobile ion as natrium strongly, in the semiconductor film or the insulating film, and then will lower th
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