About: http://webisa.webdatacommons.org/38136195

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The processing chamber wall 110 provides a common ground for the system and comprises a conductive material such as aluminum or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com