About: http://webisa.webdatacommons.org/38146115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electronic materials herein which can be cleaned by the cleaning liquid of the present invention particularly include silicon wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com