About: http://webisa.webdatacommons.org/381883996

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a drawing which illustrates a cross sectional view of a 100 mm wafer 2 positioned polished face-down in the recess milled into the 150 mm wafer 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com