About: http://webisa.webdatacommons.org/382078008

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the cathode is a pure material and the sputtering medium a pure inert gas, the substrate film will be pure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com