About: http://webisa.webdatacommons.org/382087639

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the substrate is a semiconductor wafer on which integrated circuit chips are to be produced, then each chip field on the mask is M times larger than the chip to be produced on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au