PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • If the desired height has been achieved at step 1122, then the remaining photoresists are removed at step 1124 and the process ends. [0112] FIG. 23 is a flowchart depicting a second embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom
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