About: http://webisa.webdatacommons.org/382113216

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Often additional coatings, for example an anti-reflective coating known in the industry as BARC (Bottom Antireflective Coating), are applied to the substrate to enhance the lithography process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au