| http://www.w3.org/ns/prov#value | - gions, said holes defined by walls of said insulating layer; (d) forming an adhesion and contacting layer of titanium at least in said holes, including along said walls, in contact with the underlying doped region, said adhesion and contacting layer formed to a thickness insufficient to fill said contact holes; (e) forming a barrier layer in contact with said adhesion and contacting layer, said ba
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