| http://www.w3.org/ns/prov#value | - gy, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6939211Oct 9, 2003Sep 6, 2005Micron Technology, Inc.Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutionsUS6962520Aug 24, 2004Nov 8, 2005Micron Technology, Inc.Retaining rings, planarizing apparatuses
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