| http://www.w3.org/ns/prov#value | - g a highly reactive gas plasma before introducing it at the gas supply inlet and by providing control of evaporation rate; avoiding dirt inclusion by using gas plasma to preclean the surface; avoiding delamination by pretreating surface of container to induce free radicals, where the surface is a polymer, avoiding heat damage to the container, e.g. melting/shrinking, by cooling the vaporizer; and
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