| http://www.w3.org/ns/prov#value | - Again, this discriminant circuit 111, as shown in FIG. 2, discerns whether foreign particle or defect is concave or not according to the largeness of two detection signals A and B, in which A is a signal detected by the irradiation angle ???1 while B is a signal detected by the irradiation angle ???2 and analyzes whether the degree of contamination owing to the foreign particle or defect is seriou
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