About: http://webisa.webdatacommons.org/382632498

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some embodiments, the minimum thickness of polysilicon 170 (adjacent to select gate 140) is 0.18 ??m, and the width W1 is slightly below 0.18 ??m, e.g. 0.155 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com