About: http://webisa.webdatacommons.org/382680410

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Incidentally, this etching condition includes a pressure, a discharging electric power, a bias electric power, kinds of etching gas, a flow rate of etching gas, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com