About: http://webisa.webdatacommons.org/382798808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one illustrative method of the present invention, a first layer of photoresist is deposited on top of an unpatterned underlying metal, oxide, poly or other layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com