About: http://webisa.webdatacommons.org/383025814

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 3A, a gate pattern including the gate line 2, the gate electrode 8 and the lower gate pad electrode 28 is provided on the lower substrate 42 by the first mask process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com