| http://www.w3.org/ns/prov#value | - In one embodiment, steps 603 and 604 can be switched, i.e. blockers can be incorporated into the alternating PSM design first corrected for OPC. In another embodiment, steps 603 and 604 can be combined into a single step in which model-based simulation can determine both OPC corrections and blocker inclusion for the alternating PSM design.
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