About: http://webisa.webdatacommons.org/383105291

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the pressure range of less than 10 mbar (etching, sputtering or other coating processes),
http://www.w3.org/ns/prov#wasQuotedFrom	pfeiffer-vacuum.com