About: http://webisa.webdatacommons.org/383146873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 1, a wafer 10, such as a silicon wafer, is shown to have trenches 12 etched therein.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au