About: http://webisa.webdatacommons.org/383174081

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the embodiment, preferably, the preliminary heating layer has a first region overlapping the thin film semiconductor layer, and a second region other than the first region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com