About: http://webisa.webdatacommons.org/383238981

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A gas source 122 is typically coupled to the processing chamber 100 to provide process and other gases to the interior volume 112.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au