About: http://webisa.webdatacommons.org/38325778

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method is particularly useful for producing a diffusion barrier and a planarization and interconnect material for electronic devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com