About: http://webisa.webdatacommons.org/383339552

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, it is extremely important to prevent this in the production of highly profitable super fine semiconductor integrated circuits having super fine patterns of 1 ??m or less, particularly 0.5 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com