About: http://webisa.webdatacommons.org/383577628

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The focus test mask according to claim 1, wherein there are provided a plurality of types of test patterns, and line widths of line patterns forming the test patterns are different for each type of test pattern.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com