About: http://webisa.webdatacommons.org/383839600

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The physical vapor deposition may be effected by a film forming method using an ion beam such as sputtering, ion plating, ion implantation, a joint method of ion implantation and vacuum evaporation, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com