About: http://webisa.webdatacommons.org/383853667

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a method of manufacturing a semiconductor device, such as a thin film transistor (hereinafter referred to as a TFT), using a crystalline semiconductor film formed on a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca